Microlithography: process technology for IC fabrication
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York
McGraw-Hill
1986
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| Subjects: | |
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| Physical Description: | xix, 378 p.; bib.; ill.; ind.; 23 cm |
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| ISBN: | 0070193045 |