ELLIOTT, D. J. (1986). Microlithography: Process technology for IC fabrication. McGraw-Hill.
Chicago-čujuhus (17. p.)ELLIOTT, David J. Microlithography: Process Technology for IC Fabrication. New York: McGraw-Hill, 1986.
MLA-čujuhus (9. p.)ELLIOTT, David J. Microlithography: Process Technology for IC Fabrication. McGraw-Hill, 1986.
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