APA aipamena

ELLIOTT, D. J. (1986). Microlithography: Process technology for IC fabrication. McGraw-Hill.

Chicago Style aipamena

ELLIOTT, David J. Microlithography: Process Technology for IC Fabrication. New York: McGraw-Hill, 1986.

MLA aipamena

ELLIOTT, David J. Microlithography: Process Technology for IC Fabrication. McGraw-Hill, 1986.