Cita APA (7a ed.)

ELLIOTT, D. J. (1986). Microlithography: Process technology for IC fabrication. McGraw-Hill.

Cita Chicago Style (17a ed.)

ELLIOTT, David J. Microlithography: Process Technology for IC Fabrication. New York: McGraw-Hill, 1986.

Cita MLA (9a ed.)

ELLIOTT, David J. Microlithography: Process Technology for IC Fabrication. McGraw-Hill, 1986.