Radio frequency/ radiation and plasma processing: industrial applications and advances
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| Main Author: | |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
New Holland
Technomic publising company
1985
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| Subjects: | |
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| Physical Description: | vii, 213 p.; ind.; ill.; tab.;23 cm |
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| ISBN: | 877623821 |